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Diffusion Furnace factory

lindajeone5e7f • 4 年前 • 626 次点击  

一.Quipment overview: Heat diffusion furnace adopts computer industrial control software control method, the equipment is mainly in the high temperature of 1300 ℃ condition for large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and the spread of the optical fiber and other industries, such as sintering process.The equipment is mainly suitable for 4-6 inch process silicon wafer processing 二.Main features and advantages of the equipment 1. has a powerful software function, friendly man-machine interface, the user can easily modify the process control parameters, and can be displayed at any time a variety of process status;Equipped with fault self-diagnosis software, can greatly save maintenance time; 2. the reliability of industrial PC +PLC mode, the furnace temperature, advance and retreat, gas flow, valve for automatic control, to achieve all process automation; 3. the program can achieve manual/automatic work, in the power failure or midway stop, start again can be manually heated according to the process, saving process time; 4. With a variety of process pipeline, convenient for users to choose; 5. The cold end USES PT100 to detect the ambient temperature for temperature compensation, to avoid environmental temperature changes, influence on the furnace temperature, to avoid inter-layer interference; 6. Push and pull boat control adopts high-speed pulse closed-loop control to avoid motor losing step and operation trembling.Push and pull boat run a cycle, automatic calibration position, effectively prevent positioning deviation; 7. accurate gas flow control, analog signal closed-loop control, separate the strong and weak electricity, various data interaction using standard bus, improve the anti-interference ability, ensure data security;Gas opening has slow start function; 8. Multiple alarm functions and safety protection functions; 9. Constant temperature zone automatic adjustment, cascade control, can accurately control the actual process temperature of the reaction tube; 三.Device parameter type TypeLeft/right operation mode, large working table (side adopts high efficiency purification) Number of process pipes1-5 pipes Purification table cleanlinessclass 100 (class 10000 workshop) Gas flow controlMFC control Feeding modeAutomatic push and pull, using silicon carbide slurry push and pull boat, soft landing mode Type of use4-6 inch furnace tube Working temperature600 ~ 1290 ℃ Furnace tube diametereffective ¢180-350 - mm Total power18-35kva/tube insulation power: 8-15kva/tube Three-phase five-wire system380V 10%, 50Hz 10%, the secondary line is not less than 35 square high temperature line AlarmIt has the functions of over temperature alarm, fault couple alarm, gas interlock, gas slow start and so on Length and number of sections in constant temperature zone: 400-1100mm (3-5 sections for temperature control) Temperature control precisionplus or minus 0.5 ℃ (≧ 1000 ℃) Single point temperature stability+ / - 1 ℃ / 12 h Temperature control modeIndustrial PC + PLC control + touch screen Thermocouple typeS/R thermocouple, Spike 4-10 per tube Largest controllable temperature range(500 ~ 1300 ℃) 0-15 ℃ / min Largest controllable cooling range (1300 ~ 500 ℃) 0-10 ℃ / min Overall outline size of equipmentthe size varies according to the equipment configuration 四.Main components: 1. Equipment host 2. Heating system 3. Exhaust air cooling system 4. Detox box (integrated with the equipment host) 5, cleaning table 6. Control system 7. Automatic silicon carbide pull-pull boat mechanism 1、Equipment host 2、Heating system 3、Exhaust air cooling system 4、Detox box (integrated with the equipment host) 5、cleaning table 6、Control system 7、Automatic silicon carbide pull-pull boat mechanism Diffusion Furnace factory website:http://www.diffusionfurnace.com/diffusion-furnace/

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